Structure-related strain and stress in thin hydrogenated microcrystalline silicon films

Controlled Crystallization of Hydrogenated Amorphous Silicon Thin Films by Nanocrystallite Seeding

Microcrystalline silicon thin films have attracted much attention in recent years in active matrix-liquid-crystal displays and photo-voltaic solar cells. This is due primarily to their superior transport over amorphous alternatives while maintaining a significantly lower manufacturing cost over conventional wafer-grown silicon. The general goal of current microcrystalline development efforts is...

Study of ICP-CVD grown Amorphous and Microcrystalline Silicon thin films in HIT structure

–We have investigated undoped hydrogenated amorphous silicon (a-Si:H) p-type crystalline silicon (c-Si) structures with and without a microcrystalline silicon (c-Si) buffer layer as a potential for hetero-junction (HJ) solar cell. Hydrogenated amorphous silicon and microcrystalline silicon film have been grown by inductively coupled plasma chemical vapour deposition (ICP-CVD). Solid phase crys...

Crystallization of HWCVD amorphous silicon thin films at elevated temperatures

Hot-wire chemical vapour deposition (HWCVD) has been used to prepare both hydrogenated amorphous silicon (a-Si:H) and nano/ microcrystalline thin layers as intrinsic material at different deposition conditions, in order to establish optimum conditions where the hydrogen content would be minimal and the films would still exhibit good optical properties. Experimental data shows that by varying de...

Numerical Modeling of Non-equilibrium Plasma Discharge of Hydrogenated Silicon Nitride (SiH4/NH3/H2)

In this work, we model a radiofrequency discharge of hydrogenated silicon nitride in a capacitive coupled plasma reactor using Maxwellian and non-Maxwellian electron energy distribution function. The purpose is to investigate whether there is a real advantage and a significant contribution using non-Maxwellian electron energy distribution function rather than Maxwellian one for determining the ...

Novel Deposition Technique for Fast Growth of Hydrogenated Microcrystalline Silicon Thin-Film for Thin-Film Silicon Solar Cells